Simulation of equipment design optimisation in microelectronics manufacturing
نویسندگان
چکیده
We explore different mathematical formulations, develop an object-oriented simulation environment, and perform a parametric study in the design of a high-yield, low-cost (raw material), and short-cycletime chemical vapor deposition (CVD) reactor for microelectronic manufacturing. We begin with several possible configurations for the reactor and formulate them into their corresponding numerical optimization problems. We then develop a software architecture for solving the optimization problems by integrating the heat conduction and species transport simulation codes and a modern optimization software into an objectoriented optimization environment. Numerical experiments are performed, reported, and discussed.
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